Power & temperature

SmartPower™ Substrate Heater Power Supplies

SmartPower supplies for MBE substrate heating, from 800 W to 3000 W. Voltage, current, and power control modes are selectable and adjustable from the front-panel touchscreen. The dual-output version includes current-ratio, power-ratio, and voltage-ratio settings. Options also include setpoint tracking for dual-filament heaters and pyrometer-input switching.

800 W – 3000 W
Dual-output ratio settings
Voltage / current / power control
Pyrometer input option
Ethernet + serial

View specifications Talk to an engineer

SmartPower 800 substrate heater supply front panel with Eurotherm controller

Replacement compatibility

Replacement form factor and connections

EpiTech replacement power supplies use the same connections and form factor as the models they are designed to replace. This supports replacement of obsolete supplies within the existing equipment installation.

Identify the supply being replaced when requesting a configuration so the replacement can be matched to that model.

Models

Built for the substrate heater

Dual-output ratio settings

The dual-output version includes adjustable current-ratio, power-ratio, and voltage-ratio settings for the two outputs.

Dual-filament tracking

Dual thermocouple, dual-output version with adjustable-offset setpoint (or power) tracking for dual-filament substrate heaters.

Pyrometer switching

A second input for a pyrometer. Switch from software, a remote switch, a 5 V signal or the front panel, or let a timer switch back to the thermocouple automatically.

Touchscreen output control

Select voltage, current, or power control and adjust the output setting from the front-panel touchscreen. Power, voltage and current readouts are also available over the network for logging.

Specifications

Key specifications

Output power: 800 W to 3000 W
Outputs: Single, or dual with offset tracking
Dual-output ratios: Adjustable current ratio, power ratio, and voltage ratio
Output control: Voltage, current, or power; mode selection and adjustment from the front-panel touchscreen
Inputs: Thermocouple(s), optional pyrometer
Communications: Ethernet and RS-422 serial

Interlocks

Interlock operation and recovery

Smart interlock control

While interlock 1 disables the supply, the temperature controller's PID loop is prevented from accumulating integration error. This limits excessive power demand when the interlock clears.

Soft interlock recovery

When interlock 1 clears, the requested output starts from 0% and is rate-limited so it can't reach 100% in under 10 seconds. Output recovery is controlled to limit abrupt changes in voltage and current.

Front-panel interlock bypass

The front panel allows the vacuum interlock to be bypassed. Select the interlock configuration according to the heater requirements and the effects of rapid cooling.

Communications

Communications and software compatibility

Ethernet and serial interfaces support integration with modern and legacy MBE control software. Supported protocols and interfaces are listed below.

Modbus TCPEthernet
Modbus RTURS-422 serial
EI-BisynchRS-422 serial
Molly · AMBER · Nova · Crystal XEcompatible
Machine Studioby epiware llc

Specifications and operating instructions

Request the SmartPower substrate heater supply datasheet

We'll email the full specifications and operating instructions. Or tell us about your system and an engineer will follow up about integrating it.

Contact EpiTech: 443-295-3625 · [email protected]