The complete package

Integrated electronics for MBE systems

EpiTech supplies and integrates power supplies, motion controllers, interlock and source-control equipment, and electronics racks for MBE systems. The electronics package is specified, built, and configured for your chamber, with installation and technical support. Replacement equipment is designed for the form factor of the model it replaces.

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An MBE system with EpiTech electronicsIllustration of an MBE growth system with EpiTech power supplies, system, shutter, motion, titanium sublimation and white phosphorus controllers in two racks, and control software from the separate company epiware llc at the operator desk. The valve motor is aligned with the source axis. The elevator carriage joins the transfer arm. The white phosphorus source connects by cooling tube and thermocouple to the rack; its MFC is internal. Each item links to its product page. RACK A · POWER SmartPower effusion cell power suppliesSmartPower™885.212.4SmartPower™11029.7SmartPower™612.06.1SmartPower™121514.0 Substrate heater power supplySUBSTRATE HEATER650.038.2 Heated viewport power supplyHEATED VIEWPORT1802.1 RACK B · CONTROL SmartSystem modular main unitSmartSystem™ SmartShutter controllerSmartShutter™ Motion control family: valve, CAR and elevator controllers42.10VALVE10.0 rpmCAR SmartTSP titanium sublimation controllerSmartTSP™48.0 A White phosphorus cooling controllerWHITE P · COOLING38.538.0N₂ 4.2 slm SmartManifold gas manifold controllerSmartManifold™RUN Substrate rotation (CAR) controller SmartValve valve positioner, motor in line with the source axis White phosphorus source: cooling tube and thermocouple to the rack Titanium sublimation pump Sample elevator controller epiware llc (separate software company; opens epiwarellc.com)epiware Power suppliesPower supplies System controllerSystem controller Motion controlMotion control Substrate rotationSubstrate rotation Valve positionerValve positioner Sample elevatorSample elevator Ti sublimationTi sublimation White phosphorusWhite phosphorus epiware llcepiware llc
Explore the EpiTech electronics around an MBE chamber.

Equipment

Equipment included in the electronics package

Power & temperature

SmartPower™ effusion-cell and substrate-heater supplies, SmartHeated™ viewport supplies, Eurotherm boxes for existing power supplies, and bakeout controllers configured around your heater zones.

Motion

Valve positioners for your crackers, SmartMotion CAR control with separate rotation-axis and position-axis controllers, and sample elevator control, all on one servo platform.

System control

SmartSystem™ modular control with distributed I/O, cryopump and relay modules, and a serial hub on an encrypted Ethernet network. SmartShutter™ controls shutters and valves. SmartManifold™ gas manifold controllers display two temperature-control zones and a pressure-control zone.

Sources & pumps

A gas-cooled white phosphorus controller and SmartTSP™ for titanium sublimation pumps.

Rack & infrastructure

New circuit breakers, Ethernet switches, serial patch panels, and, if you want them, a new rack and new wiring.

Integration

System integration and support

01

Ethernet and serial communications

Ethernet and serial interfaces support integration with modern and legacy control software. Protocol support is listed on each product page.

SmartSystem supports open and encrypted Ethernet connections to compatible MBE control software. Encrypted software connections are currently supported only by Machine Studio from epiware llc.

02

Replacement form factor and connections

Replacement power supplies use the connections and form factor of the intended original model. Motion-controller replacements match the form factor of the older Veeco model being replaced and use EpiTech motors and cables with metal screw-together connectors.

03

Engineering support

Get support from the engineers who designed and built your electronics, with one team to help you work through the system.

How it works

Assessment, installation, and support

  1. AssessmentWe review your system, your sources and your software, and what you want it to do.
  2. SpecificationA package sized to your chamber: which controllers, how many channels, which options.
  3. BuildWe build, configure and test every unit, and the rack if you want one.
  4. InstallationOn-site install and wiring, with your interlocks and recipes set up.
  5. Training & supportHands-on training for your team, and ongoing support from the engineers who built it.

Equipment replacement

Individual equipment replacement

EpiTech equipment can be installed individually to replace obsolete supplies and controllers. The replacement is matched to the intended equipment model, with power-supply connection compatibility or EpiTech motion hardware as appropriate. Additional equipment can be integrated in later stages.

For broader system upgrades, see MBE modernization.

Two SmartManifold gas manifold controllers, rack-mounted side by side

Specify an electronics package

Contact EpiTech with your chamber configuration and electronics requirements.

Schedule an assessment