This is a lightly used (less than 4 years total) and particularly well maintained Veeco Gen II, previously used for III-Nitrides deposition. This MBE could be used to grow topological materials, quantum dots, quantum memory, lasers, amplifiers, detectors, and much more. This MBE can be configured to grow Arsenides, Phosphides, Antimonides, Oxides, Nitrides, Dichalcogenides, etc. with few modifications. It has a big CTI-10 cryopump and a 400 l/s ion pump for ultra-pure epitaxial growth potential. EpiTech and E-science are in the process of disassembling, cleaning, and reassembling, and qualifying the MBE system. We are looking for a buyer that wants to invest in modernizing this beautiful and productive MBE. EpiTech plans to replace the outdated and unsupported OEM electronics with new, modern electronics, including the computer, control software, Molly Interface Unit (MIU), interlock system, and power supplies, etc. E-Science will provide new effusion cells and/or upgraded substrate heater, as needed. Please contact EpiTech or E-Science with any questions. More details and pictures are available here.
Details:
● Molecular Beam Epitaxy (MBE) system, 3”
● UHV Growth and buffer chambers
● HV load lock chamber
● Continuous Azimuthal Rotating (CAR) with 3" substrate heater
● (8 + 2) Source ports, 4.50" conflat flanges
● Pyrometer viewport flange, 2.75”
● Heated viewport, 2.75”
● (2) ellipsometer ports, 4.50”
● Gas flow control system
● Electrical growth panel: 208 VAC, 200 A, 50/60 Hz
● Electrical bake panel: 208 VAC, 100 A, 50/60 Hz
Existing Sources:
● (6) Effusion cells
o (2) Al
o Ga
o In
o Si
o Mg
● Veeco plasma source
Vacuum Pumps:
● CTI Cryo-Torr 10 Cryo pump
● GAMMA Vacuum ion pump for growth chamber (~400 l/m)
● GAMMA Vacuum ion pump for preparation chamber (~280 l/m)
● VARIAN TV301 Navigator TMP (Pumping speed: 250l/sec Nitrogen)
● (2) Titanium sublimation pumps
● (2) scroll pumps
In-situ Diagnostics:
● SRS RGA 200
● IRCON MODLINE 3 Infrared thermometer sensor
● Staib RHEED Gun
● KSA 400 RHEED Analysis system
● (3) Granville Phillips GP350 Ionization gauge controllers
● Granville Phillips 358 Micron-Ion controller
Legacy Electronics (continued use expected)
● Veeco RF Matching network controller (Auto-tuner)
● Advanced Energy RFX600A RF Generator
● Austin Scientific 320 Cryopump monitor
● (2) VARIAN Sublimation controllers
● RHEED STAIB Instruments power supply
● DIGITEL Multiple Pump Controller (MPC)
● (4) EUROTHERM 2408 Bake timers
● CTI 9600 Compressor
Proposed Electronics Modernization:
● New high-performance computer
● New Control Software (EpiTech software, Riber Crystal XE, IntelliEpi Nova, etc.)
● EpiTech SmartSystem Controller
● EpiTech SmartSubstrate Controller
● EpiTech SmartPower temperature controlling power supplies
● EpiTech SmartHeated HVP power supply
● EpiTech SmartValve Controllers (if needed for new sources)
Contact E-Science for source/substrate heater options